Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

S. O. Kim; J. G. Eden

doi:10.1109/TPS.2005.845309

Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

S. O. Kim
, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Arrays of microdischarge devices, 100 × 100 μm² in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5 × 5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.

Original language	English (US)
Pages (from-to)	566-567
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	2 I
DOIs	https://doi.org/10.1109/TPS.2005.845309
State	Published - Apr 2005

Keywords

Interdigitated electrodes
Microdischarges
Microplasmas
Photolithography

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Online availability

10.1109/TPS.2005.845309

Library availability

Discover UIUC Full Text

Cite this

@article{cb358d55ef0240959b15120ac25036ed,

title = "Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes",

abstract = "Arrays of microdischarge devices, 100 {\texttimes} 100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5 {\texttimes} 5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.",

keywords = "Interdigitated electrodes, Microdischarges, Microplasmas, Photolithography",

author = "Kim, \{S. O.\} and Eden, \{J. G.\}",

note = "Manuscript received July 2, 2004. This work was supported by the U.S. Air Force Office of Scientific Research (H. R. Schlossberg) under Grant F49620-03-1-0391. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TPS.2005.845309 Fig. 2. Optical micrograph of four 100 100 m pixels in a 5 5 array in which the electrodes appear at the backside of each microcavity. The width and pitch of the interdigitated Cr electrodes are both 20 m.",

year = "2005",

month = apr,

doi = "10.1109/TPS.2005.845309",

language = "English (US)",

volume = "33",

pages = "566--567",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 I",

}

TY - JOUR

T1 - Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

AU - Kim, S. O.

AU - Eden, J. G.

N1 - Manuscript received July 2, 2004. This work was supported by the U.S. Air Force Office of Scientific Research (H. R. Schlossberg) under Grant F49620-03-1-0391. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TPS.2005.845309 Fig. 2. Optical micrograph of four 100 100 m pixels in a 5 5 array in which the electrodes appear at the backside of each microcavity. The width and pitch of the interdigitated Cr electrodes are both 20 m.

PY - 2005/4

Y1 - 2005/4

N2 - Arrays of microdischarge devices, 100 × 100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5 × 5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.

AB - Arrays of microdischarge devices, 100 × 100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5 × 5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.

KW - Interdigitated electrodes

KW - Microdischarges

KW - Microplasmas

KW - Photolithography

UR - https://www.scopus.com/pages/publications/18844369071

UR - https://www.scopus.com/pages/publications/18844369071#tab=citedBy

U2 - 10.1109/TPS.2005.845309

DO - 10.1109/TPS.2005.845309

M3 - Article

AN - SCOPUS:18844369071

SN - 0093-3813

VL - 33

SP - 566

EP - 567

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 2 I

ER -

Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

Abstract

Keywords

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this