Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

S. O. Kim, J. G. Eden

Research output: Contribution to journalArticle

Abstract

Arrays of microdischarge devices, 100 × 100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5 × 5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.

Original languageEnglish (US)
Pages (from-to)566-567
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
StatePublished - Apr 1 2005

Keywords

  • Interdigitated electrodes
  • Microdischarges
  • Microplasmas
  • Photolithography

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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