@article{cb358d55ef0240959b15120ac25036ed,
title = "Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes",
abstract = "Arrays of microdischarge devices, 100 × 100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5 × 5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.",
keywords = "Interdigitated electrodes, Microdischarges, Microplasmas, Photolithography",
author = "Kim, {S. O.} and Eden, {J. G.}",
note = "Funding Information: Manuscript received July 2, 2004. This work was supported by the U.S. Air Force Office of Scientific Research (H. R. Schlossberg) under Grant F49620-03-1-0391. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: jgeden@uiuc.edu). Digital Object Identifier 10.1109/TPS.2005.845309 Fig. 2. Optical micrograph of four 100 100 m pixels in a 5 5 array in which the electrodes appear at the backside of each microcavity. The width and pitch of the interdigitated Cr electrodes are both 20 m.",
year = "2005",
month = apr,
doi = "10.1109/TPS.2005.845309",
language = "English (US)",
volume = "33",
pages = "566--567",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2 I",
}