Arrays of silicon microdischarge devices with multicomponent dielectrics

Arrays as large as 15 X 15 of microdischarge devices having inverted pyramidal silicon cathodes (50 μm x 50 μm) and SiO₂-Si₃N₄-polymer composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150 V for a 10 x 10 pixel array and 1000 Torr of Ne have been measured. Single (50 μm x 50 μm) pyramidal cathode devices operate at voltages as low as 113 V when the Ne pressure is 900 Torr.