Arrays of silicon microdischarge devices with multicomponent dielectrics

S. J. Park, J. G. Eden, J. Chen, C. Liu, J. J. Ewing

Research output: Contribution to journalArticlepeer-review


Arrays as large as 15 X 15 of microdischarge devices having inverted pyramidal silicon cathodes (50 μm x 50 μm) and SiO2-Si3N4-polymer composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150 V for a 10 x 10 pixel array and 1000 Torr of Ne have been measured. Single (50 μm x 50 μm) pyramidal cathode devices operate at voltages as low as 113 V when the Ne pressure is 900 Torr.

Original languageEnglish (US)
Pages (from-to)1773-1775
Number of pages3
JournalOptics Letters
Issue number22
StatePublished - Nov 15 2001

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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