Arrays of microplasma jets generated by double parabolic microcavities in an hourglass configuration

J. H. Cho, M. H. Kim, S. J. Park, J. G. Eden

Research output: Contribution to journalArticlepeer-review

Abstract

Microplasma jets have been generated in double parabolic microcavities arranged in an hourglass structure with a 300-μm-diameter throat. Fabricated by micropowder blasting of nanoporous alumina grown on Al foil, the parabolic cavities are situated back-to-back and operated with a feedstock gas having a flow rate of ∼1.5-6 standard L/min. Arrays as large as 6 × 6 jets have been demonstrated for which the jet pitch and fill factor are 1.25 mm and 17%, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He(23S) → N2+ Penning ionization reaction zone.

Original languageEnglish (US)
Article number6051521
Pages (from-to)2376-2377
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume39
Issue number11 PART 1
DOIs
StatePublished - Nov 2011

Keywords

  • Atmospheric pressure plasma jet
  • microplasma

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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