Arrays of microplasma jets generated by double parabolic microcavities in an hourglass configuration

J. H. Cho; M. H. Kim; S. J. Park; J. G. Eden

doi:10.1109/TPS.2011.2165856

Arrays of microplasma jets generated by double parabolic microcavities in an hourglass configuration

J. H. Cho, M. H. Kim, S. J. Park, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Microplasma jets have been generated in double parabolic microcavities arranged in an hourglass structure with a 300-μm-diameter throat. Fabricated by micropowder blasting of nanoporous alumina grown on Al foil, the parabolic cavities are situated back-to-back and operated with a feedstock gas having a flow rate of ∼1.5-6 standard L/min. Arrays as large as 6 × 6 jets have been demonstrated for which the jet pitch and fill factor are 1.25 mm and 17%, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He(2³S) → N₂⁺ Penning ionization reaction zone.

Original language	English (US)
Article number	6051521
Pages (from-to)	2376-2377
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	39
Issue number	11 PART 1
DOIs	https://doi.org/10.1109/TPS.2011.2165856
State	Published - Nov 2011

Keywords

Atmospheric pressure plasma jet
microplasma

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Online availability

10.1109/TPS.2011.2165856

Library availability

Discover UIUC Full Text

Cite this

@article{046baaf41e3043bda971ccb0e457e60f,

title = "Arrays of microplasma jets generated by double parabolic microcavities in an hourglass configuration",

abstract = "Microplasma jets have been generated in double parabolic microcavities arranged in an hourglass structure with a 300-μm-diameter throat. Fabricated by micropowder blasting of nanoporous alumina grown on Al foil, the parabolic cavities are situated back-to-back and operated with a feedstock gas having a flow rate of ∼1.5-6 standard L/min. Arrays as large as 6 × 6 jets have been demonstrated for which the jet pitch and fill factor are 1.25 mm and 17%, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He(23S) → N2+ Penning ionization reaction zone.",

keywords = "Atmospheric pressure plasma jet, microplasma",

author = "Cho, {J. H.} and Kim, {M. H.} and Park, {S. J.} and Eden, {J. G.}",

note = "Funding Information: Manuscript received December 1, 2010; accepted May 28, 2011. Date of current version November 9, 2011. This work was supported in part by the Korea Research Foundation under Grant KRF-2009-352-D00117 and in part by the AFOSR. The authors are with the Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2011.2165856 Fig. 1. Partial schematic diagram (in cross section) of a single Al/Al2O3 microcavity plasma jet device comprising two back-to-back parabolic cavities with a buried Al electrode.",

year = "2011",

month = nov,

doi = "10.1109/TPS.2011.2165856",

language = "English (US)",

volume = "39",

pages = "2376--2377",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "11 PART 1",

}

TY - JOUR

T1 - Arrays of microplasma jets generated by double parabolic microcavities in an hourglass configuration

AU - Cho, J. H.

AU - Kim, M. H.

AU - Park, S. J.

AU - Eden, J. G.

N1 - Funding Information: Manuscript received December 1, 2010; accepted May 28, 2011. Date of current version November 9, 2011. This work was supported in part by the Korea Research Foundation under Grant KRF-2009-352-D00117 and in part by the AFOSR. The authors are with the Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2011.2165856 Fig. 1. Partial schematic diagram (in cross section) of a single Al/Al2O3 microcavity plasma jet device comprising two back-to-back parabolic cavities with a buried Al electrode.

PY - 2011/11

Y1 - 2011/11

N2 - Microplasma jets have been generated in double parabolic microcavities arranged in an hourglass structure with a 300-μm-diameter throat. Fabricated by micropowder blasting of nanoporous alumina grown on Al foil, the parabolic cavities are situated back-to-back and operated with a feedstock gas having a flow rate of ∼1.5-6 standard L/min. Arrays as large as 6 × 6 jets have been demonstrated for which the jet pitch and fill factor are 1.25 mm and 17%, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He(23S) → N2+ Penning ionization reaction zone.

AB - Microplasma jets have been generated in double parabolic microcavities arranged in an hourglass structure with a 300-μm-diameter throat. Fabricated by micropowder blasting of nanoporous alumina grown on Al foil, the parabolic cavities are situated back-to-back and operated with a feedstock gas having a flow rate of ∼1.5-6 standard L/min. Arrays as large as 6 × 6 jets have been demonstrated for which the jet pitch and fill factor are 1.25 mm and 17%, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He(23S) → N2+ Penning ionization reaction zone.

KW - Atmospheric pressure plasma jet

KW - microplasma

UR - http://www.scopus.com/inward/record.url?scp=81255203759&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=81255203759&partnerID=8YFLogxK

U2 - 10.1109/TPS.2011.2165856

DO - 10.1109/TPS.2011.2165856

M3 - Article

AN - SCOPUS:81255203759

SN - 0093-3813

VL - 39

SP - 2376

EP - 2377

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 11 PART 1

M1 - 6051521

ER -

Arrays of microplasma jets generated by double parabolic microcavities in an hourglass configuration

Abstract

Keywords

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this