@inproceedings{89c74206d5da487da4ebeb0d7ab3673d,
title = "Arrays of Microplasma-assisted Atomic Layer Deposition and Etching Free Patterning of Ga2O3Thin Film with Flexible DUV Photodetector",
abstract = "Microplasma arrays assisted atomic layer deposition (MALD) have been used to deposit gallium oxide (Ga2O3) thin film on the rigid and flexible substrate in order to fabricate deep-ultraviolet (DUV) photodetector under 254 nm illumination.",
author = "Jinhong Kim and Mironov, {Andrey E.} and Sievers, {Dane J.} and Park, {Sung Jin} and Eden, {J. Gary}",
note = "Publisher Copyright: {\textcopyright} 2021 OSA.; 2021 Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",
year = "2021",
month = may,
language = "English (US)",
series = "2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings",
address = "United States",
}