Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

S. J. Park; J. Chen; C. Liu; J. G. Eden

doi:10.1049/el:20010086

Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

S. J. Park
, J. Chen
, C. Liu
, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

Original language	English (US)
Pages (from-to)	171-172
Number of pages	2
Journal	Electronics Letters
Volume	37
Issue number	3
DOIs	https://doi.org/10.1049/el:20010086
State	Published - Feb 1 2001

ASJC Scopus subject areas

Electrical and Electronic Engineering

Online availability

10.1049/el:20010086

Library availability

Discover UIUC Full Text

Cite this

@article{4bb4be5e8d6a4e6cb7a4d07990f0e9d8,

title = "Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes",

abstract = "The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.",

author = "Park, \{S. J.\} and J. Chen and C. Liu and Eden, \{J. G.\}",

year = "2001",

month = feb,

day = "1",

doi = "10.1049/el:20010086",

language = "English (US)",

volume = "37",

pages = "171--172",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons, Ltd.",

number = "3",

}

TY - JOUR

T1 - Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

AU - Park, S. J.

AU - Chen, J.

AU - Liu, C.

AU - Eden, J. G.

PY - 2001/2/1

Y1 - 2001/2/1

N2 - The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

AB - The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

UR - https://www.scopus.com/pages/publications/0034817956

UR - https://www.scopus.com/pages/publications/0034817956#tab=citedBy

U2 - 10.1049/el:20010086

DO - 10.1049/el:20010086

M3 - Article

AN - SCOPUS:0034817956

SN - 0013-5194

VL - 37

SP - 171

EP - 172

JO - Electronics Letters

JF - Electronics Letters

IS - 3

ER -

Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

Abstract

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this