The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.
|Original language||English (US)|
|Number of pages||2|
|State||Published - Feb 1 2001|
ASJC Scopus subject areas
- Electrical and Electronic Engineering