Arrays of microcavity plasma devices: Versatile platform for the next generation of plasma displays

J. G. Eden, S. J. Park

Research output: Contribution to journalConference article


Microcavity plasma devices having characteristic dimensions below 100 μm have been investigated as a candidate for the next generation of plasma displays. Arrays of inverted pyramid microcavity devices, fabricated in Si with emitting apertures of (50 μm)2 and designed for AC or bipolar excitation, demonstrate a luminous efficacy above 6 lm/W at pressures up to and beyond one atmosphere of Ne/Xe mixtures. Also the design of analogous microplasma devices in ceramic multilayer structures or plastic substrates is discussed.

Original languageEnglish (US)
Pages (from-to)473-476
Number of pages4
JournalProceedings of International Meeting on Information Display
StatePublished - Dec 1 2006
EventIMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of
Duration: Aug 22 2006Aug 25 2006


ASJC Scopus subject areas

  • Engineering(all)

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