Abstract
Microcavity plasma devices having characteristic dimensions below 100 μm have been investigated as a candidate for the next generation of plasma displays. Arrays of inverted pyramid microcavity devices, fabricated in Si with emitting apertures of (50 μm)2 and designed for AC or bipolar excitation, demonstrate a luminous efficacy above 6 lm/W at pressures up to and beyond one atmosphere of Ne/Xe mixtures. Also the design of analogous microplasma devices in ceramic multilayer structures or plastic substrates is discussed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 473-476 |
| Number of pages | 4 |
| Journal | Proceedings of International Meeting on Information Display |
| Volume | 2006 |
| State | Published - 2006 |
| Event | IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of Duration: Aug 22 2006 → Aug 25 2006 |
ASJC Scopus subject areas
- General Engineering