Arrays of addressable microcavity plasma devices

S. J. Park, P. A. Tchertchian, S. H. Sung, T. M. Spinka, J. G. Eden

Research output: Contribution to journalArticlepeer-review


Addressable microcavity plasma devices with two- or three-electrode, dielectric barrier designs have been fabricated in 20 × 20 or 50 × 50 device arrays in Si(100) and characterized in the rare gases. Each device comprises a metal/Si electrode structure, a dielectric stack, and an inverted square pyramid microcavity having an emitting aperture of 50 × 50 μm2 or 100 × 100 μm2. Arrays with filling factors of 11% and 25% [for (100 μm2 and (50 μm2 device arrays, respectively] and a crossed electrode (passive matrix) geometry exhibit operating voltages in Ne of ∼220-300 V (RMS) when driven by a 20-kHz sinusoidal driving voltage. Displacement currents are ∼50% of those for previous Si microplasma device arrays, and when exciting the array with 100-140-V pulses, the rise time of the wavelength-integrated fluorescence is observed to be < 600 ns for pure Ne or Ne/5%Xe gas mixtures at a pressure of 700 torr. A full address and sustain pulse sequence has also been demonstrated with a symmetrical three-electrode device structure.

Original languageEnglish (US)
Pages (from-to)215-222
Number of pages8
JournalIEEE Transactions on Plasma Science
Issue number2 I
StatePublished - Apr 2007


  • Addressable
  • Displays
  • Microdischarge
  • Microplasma
  • Silicon devices

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics


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