Abstract
Electrical characteristics of arrays of (50 μm)2 Si microplasma devices operating in 500-900 Torr of Ne are presented. Arrays as large as 200 × 200 pixels have been AC-excited at frequencies of 5-20 kHz and all exhibit reproducible ignition voltages and lifetimes. At 700 Torr, the power consumed per pixel for a 200 × 200 pixel array is 85 ±2 μW, 190 ±2 μW, and 290 ±2 μW for excitation frequencies of 5, 10, and 15kHz, respectively, and 5.5, 12.0, and 17.8mA, respectively, of total current (RMS) drawn by the array.
Original language | English (US) |
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Pages (from-to) | 311-312 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 41 |
Issue number | 6 |
DOIs | |
State | Published - Mar 17 2005 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering