Electrical characteristics of arrays of (50 μm)2 Si microplasma devices operating in 500-900 Torr of Ne are presented. Arrays as large as 200 × 200 pixels have been AC-excited at frequencies of 5-20 kHz and all exhibit reproducible ignition voltages and lifetimes. At 700 Torr, the power consumed per pixel for a 200 × 200 pixel array is 85 ±2 μW, 190 ±2 μW, and 290 ±2 μW for excitation frequencies of 5, 10, and 15kHz, respectively, and 5.5, 12.0, and 17.8mA, respectively, of total current (RMS) drawn by the array.
|Original language||English (US)|
|Number of pages||2|
|State||Published - Mar 17 2005|
ASJC Scopus subject areas
- Electrical and Electronic Engineering