@inproceedings{48986badd84b4d6a9e87ee7b5d88adc2,
title = "Arraying SH0 Lithium Niobate laterally vibrating resonators for mitigation of higher order spurious modes",
abstract = "This paper studies the origin of higher-order spurious modes in shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators (LVRs). Near-zero spurious mode response and a high figure of merit (FoM) of 154 have been achieved concurrently by arraying single resonators with only two electrodes at the orientation of 10° to -Y axis in the X-cut plane. The high FoM (154) results from a high electromechanical coupling (kt2) of 14.1\% and quality factor (Q) of 1093. In contrast to a conventional resonator with multiple (> 2) interdigitated electrodes, the fabricated resonator array exhibits an unprecedented spectral range of spurious-free response, 320\% centered about the resonance, thus further advancing the LiNbO3 LVR technology toward the wireless marketplace.",
author = "Song, \{Yong Ha\} and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",
year = "2016",
month = feb,
day = "26",
doi = "10.1109/MEMSYS.2016.7421570",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "111--114",
booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",
address = "United States",
}