Arraying SH0 Lithium Niobate laterally vibrating resonators for mitigation of higher order spurious modes

Yong Ha Song, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper studies the origin of higher-order spurious modes in shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators (LVRs). Near-zero spurious mode response and a high figure of merit (FoM) of 154 have been achieved concurrently by arraying single resonators with only two electrodes at the orientation of 10° to -Y axis in the X-cut plane. The high FoM (154) results from a high electromechanical coupling (kt2) of 14.1% and quality factor (Q) of 1093. In contrast to a conventional resonator with multiple (> 2) interdigitated electrodes, the fabricated resonator array exhibits an unprecedented spectral range of spurious-free response, 320% centered about the resonance, thus further advancing the LiNbO3 LVR technology toward the wireless marketplace.

Original languageEnglish (US)
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages111-114
Number of pages4
ISBN (Electronic)9781509019731
DOIs
StatePublished - Feb 26 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: Jan 24 2016Jan 28 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/TerritoryChina
CityShanghai
Period1/24/161/28/16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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