TY - GEN
T1 - Arraying SH0 Lithium Niobate laterally vibrating resonators for mitigation of higher order spurious modes
AU - Song, Yong Ha
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/2/26
Y1 - 2016/2/26
N2 - This paper studies the origin of higher-order spurious modes in shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators (LVRs). Near-zero spurious mode response and a high figure of merit (FoM) of 154 have been achieved concurrently by arraying single resonators with only two electrodes at the orientation of 10° to -Y axis in the X-cut plane. The high FoM (154) results from a high electromechanical coupling (kt2) of 14.1% and quality factor (Q) of 1093. In contrast to a conventional resonator with multiple (> 2) interdigitated electrodes, the fabricated resonator array exhibits an unprecedented spectral range of spurious-free response, 320% centered about the resonance, thus further advancing the LiNbO3 LVR technology toward the wireless marketplace.
AB - This paper studies the origin of higher-order spurious modes in shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators (LVRs). Near-zero spurious mode response and a high figure of merit (FoM) of 154 have been achieved concurrently by arraying single resonators with only two electrodes at the orientation of 10° to -Y axis in the X-cut plane. The high FoM (154) results from a high electromechanical coupling (kt2) of 14.1% and quality factor (Q) of 1093. In contrast to a conventional resonator with multiple (> 2) interdigitated electrodes, the fabricated resonator array exhibits an unprecedented spectral range of spurious-free response, 320% centered about the resonance, thus further advancing the LiNbO3 LVR technology toward the wireless marketplace.
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U2 - 10.1109/MEMSYS.2016.7421570
DO - 10.1109/MEMSYS.2016.7421570
M3 - Conference contribution
AN - SCOPUS:84970996691
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 111
EP - 114
BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Y2 - 24 January 2016 through 28 January 2016
ER -