Area Selective Cvd Of Metallic Films Using Precursor Gases And Inhibitors

John R Abelson (Inventor), Gregory S. Girolami (Inventor), Sumeng Liu (Inventor), Elham Mohimi (Inventor), Zhejun Zhang (Inventor)

Research output: Patent

Original languageEnglish (US)
U.S. patent number11584986
StatePublished - Feb 21 2023

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