Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices

E. V. Titov, Michael I. Zeifman, Deborah A. Levin

Research output: Contribution to conferencePaper

Abstract

In our recent work, we have undertaken limiting 3D cases in order to understand the range of flows in present MEMS propulsion devices. The considered two cases are similar except for the plenum stagnation pressures and temperatures as well as modest differences in the geometrical configurations. Navier Stokes solutions were obtained for both cases while Direct Simulation Monte Carlo (DSMC) approach was utilized to model a low pressure case. Since the influence of the boundary layer on the flow characteristics is significant for the low Reynolds number cases, a special effort was made to predict the boundary layer structure as accurately as possible. To access the future development of a hybrid method, inviscid solutions were obtained and compared with an Euler solver and with an inviscid form of DSMC. In addition, different types of the boundary conditions were applied during the flow investigations in order to understand their influence on the flow structure.

Original languageEnglish (US)
Pages1101-1120
Number of pages20
StatePublished - Dec 1 2005
Externally publishedYes
Event43rd AIAA Aerospace Sciences Meeting and Exhibit - Reno, NV, United States
Duration: Jan 10 2005Jan 13 2005

Other

Other43rd AIAA Aerospace Sciences Meeting and Exhibit
CountryUnited States
CityReno, NV
Period1/10/051/13/05

Fingerprint

MEMS
Boundary layers
Kinetics
Flow structure
Propulsion
Reynolds number
Boundary conditions
Temperature
Monte Carlo simulation

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Titov, E. V., Zeifman, M. I., & Levin, D. A. (2005). Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices. 1101-1120. Paper presented at 43rd AIAA Aerospace Sciences Meeting and Exhibit, Reno, NV, United States.

Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices. / Titov, E. V.; Zeifman, Michael I.; Levin, Deborah A.

2005. 1101-1120 Paper presented at 43rd AIAA Aerospace Sciences Meeting and Exhibit, Reno, NV, United States.

Research output: Contribution to conferencePaper

Titov, EV, Zeifman, MI & Levin, DA 2005, 'Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices', Paper presented at 43rd AIAA Aerospace Sciences Meeting and Exhibit, Reno, NV, United States, 1/10/05 - 1/13/05 pp. 1101-1120.
Titov EV, Zeifman MI, Levin DA. Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices. 2005. Paper presented at 43rd AIAA Aerospace Sciences Meeting and Exhibit, Reno, NV, United States.
Titov, E. V. ; Zeifman, Michael I. ; Levin, Deborah A. / Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices. Paper presented at 43rd AIAA Aerospace Sciences Meeting and Exhibit, Reno, NV, United States.20 p.
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