FingerprintDive into the research topics of 'Application of the deuterium sintering process to improve the device design rule in reducing plasma induced damages'. Together they form a unique fingerprint.
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Young Kwang Kim, Seok Ha Lee, Hyui Seung Lee, Bong Seok Kim, Yong Hee Lee, Jinju Lee, Kangguo Cheng, Zhi Chen, Karl Hess, Joseph W. Lyding
Research output: Contribution to conference › Paper › peer-review