Application of a parallel DSMC technique to predict flow characteristics in microfluidic filters

Ozgur Aktas, N. R. Aluru, Umberto Ravaioli

Research output: Contribution to journalArticlepeer-review


Using a parallel implementation of the direct simulation Monte Carlo (DSMC) method, periodic MEMS microfilters are studied in detail. The dependence of the flow characteristics on geometry, Knudsen number, pressure difference, spacing between the filter elements, and accommodation coefficients are investigated. By comparing DSMC results with the widely used analytical formulas, the validity range of the analytical approaches is evaluated. The simulation results show that velocity slip exists both on the filter channel walls and on the filter membrane and results in an increased flow rate. Velocity slip increases strongly with decreasing accommodation coefficients. For long channels, this results in a strong increase in flow rate; whereas for short channels, the increase in flow rate is limited. For the filter separations considered in this paper, we observe that separation between filter channels does not influence the flow rate within each channel.

Original languageEnglish (US)
Pages (from-to)538-549
Number of pages12
JournalJournal of Microelectromechanical Systems
Issue number4
StatePublished - Dec 2001


  • Incomplete accommodation
  • Microfilters
  • Microfluidics
  • Parallel direct simulation Monte Carlo (DSMC)
  • Rarefied gas dynamics
  • Slip flow

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering


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