Apparatus and method for testing a thin film material. A chip is fabricated that includes the specimen to be tested, held by a force sensor beam at a first longitudinal end and by a support structure at a second longitudinal end. The chip is configured to be placed into a testing environment for quantitative and qualitative material property testing of the specimen. Methods are also provided for fabricating a testing chip.
|Original language||English (US)|
|U.S. patent number||6817255|
|State||Published - Nov 16 2004|