Abstract
Apparatus and method for testing a thin film material. A chip is fabricated that includes the specimen to be tested, held by a force sensor beam at a first longitudinal end and by a support structure at a second longitudinal end. The chip is configured to be placed into a testing environment for quantitative and qualitative material property testing of the specimen. Methods are also provided for fabricating a testing chip.
| Original language | English (US) |
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| U.S. patent number | 6817255 |
| Filing date | 9/11/02 |
| State | Published - Nov 16 2004 |