Abstract
Method and apparatus for determining a thickness of a deposited material. Energy is passed through the deposited material, wherein some of the energy is transmitted. The transmitted energy is received, and the received energy is used to determine a thickness of the deposited material.
| Original language | English (US) |
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| U.S. patent number | 7301149 |
| Filing date | 5/6/04 |
| State | Published - Nov 27 2007 |