Anomalies observed in wafer level microwave testing

T. H. Miers, Andreas C Cangellaris, D. Williams, R. Marks

Research output: Contribution to journalArticle

Abstract

Two anomalies have been observed in the course of developing planar wafer level standards for the testing of GaAs monolithic microwave integrated circuits. The first involves a low-frequency characteristic impedance change of microstrip and coplanar waveguide transmission lines. This effect, which is due to conductor loss of the transmission media, can result in improper/inaccurate calibrations and measurements. The second anomaly results from resonant coupling of the microwave probe into adjacent structures on the wafer. This can occur during calibration or measurement and results in extreme inaccuracies at the resonant frequencies. Methods to eliminate these anomalies are addressed.

Original languageEnglish (US)
Pages (from-to)1121-1124
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume3
StatePublished - 1991
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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