Anodic oxidation during MEMS processing of silicon and polysilicon: Native oxides can be thicker than you think

Harold Kahn, Chris Deeb, Ioannis Chasiotis, Arthur H. Heuer

Research output: Contribution to journalArticle

Fingerprint Dive into the research topics of 'Anodic oxidation during MEMS processing of silicon and polysilicon: Native oxides can be thicker than you think'. Together they form a unique fingerprint.

Engineering & Materials Science