A simplified analytical model is developed to predict the state of an electrostatically actuated micro pump at equilibrium. The state includes the deformed shape and internal stresses of the diaphragm and the pressure of the fluid when the actuator is subjected to a given applied voltage. The model is based on the minimization of the total energy consisting of the capacitive energy, strain energy of the diaphragm, and the energy of the fluid which is considered to be an ideal gas. The method employed to study two pumps, one with an axisymmetric single cavity, and the other with an axisymmetric annular cavity.

Original languageEnglish (US)
Pages (from-to)335-345
Number of pages11
JournalJournal of Microelectromechanical Systems
Issue number3
StatePublished - Sep 1999

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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