Analytical modeling of electrostatic membrane actuator for micro pumps

Research output: Contribution to journalArticle

Abstract

A simplified analytical model is developed to predict the state of an electrostatically actuated micro pump at equilibrium. The state includes the deformed shape and internal stresses of the diaphragm and the pressure of the fluid when the actuator is subjected to a given applied voltage. The model is based on the minimization of the total energy consisting of the capacitive energy, strain energy of the diaphragm, and the energy of the fluid which is considered to be an ideal gas. The method employed to study two pumps, one with an axisymmetric single cavity, and the other with an axisymmetric annular cavity.

Original languageEnglish (US)
Pages (from-to)335-345
Number of pages11
JournalJournal of Microelectromechanical Systems
Volume8
Issue number3
DOIs
StatePublished - Sep 1 1999

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Diaphragms
Electrostatics
Actuators
Pumps
Membranes
Fluids
Strain energy
Analytical models
Residual stresses
Electric potential
Gases

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Analytical modeling of electrostatic membrane actuator for micro pumps. / Saif, M. T.A.; Alaca, B. Erdem; Sehitoglu, Huseyin.

In: Journal of Microelectromechanical Systems, Vol. 8, No. 3, 01.09.1999, p. 335-345.

Research output: Contribution to journalArticle

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