Analytical modeling of electrostatic membrane actuator for micro pumps

M. T.A. Saif; B. Erdem Alaca; Huseyin Sehitoglu

doi:10.1109/84.788638

Analytical modeling of electrostatic membrane actuator for micro pumps

M. T.A. Saif, B. Erdem Alaca, Huseyin Sehitoglu

Research output: Contribution to journal › Article › peer-review

Abstract

A simplified analytical model is developed to predict the state of an electrostatically actuated micro pump at equilibrium. The state includes the deformed shape and internal stresses of the diaphragm and the pressure of the fluid when the actuator is subjected to a given applied voltage. The model is based on the minimization of the total energy consisting of the capacitive energy, strain energy of the diaphragm, and the energy of the fluid which is considered to be an ideal gas. The method employed to study two pumps, one with an axisymmetric single cavity, and the other with an axisymmetric annular cavity.

Original language	English (US)
Pages (from-to)	335-345
Number of pages	11
Journal	Journal of Microelectromechanical Systems
Volume	8
Issue number	3
DOIs	https://doi.org/10.1109/84.788638
State	Published - Sep 1999

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/84.788638

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abstract = "A simplified analytical model is developed to predict the state of an electrostatically actuated micro pump at equilibrium. The state includes the deformed shape and internal stresses of the diaphragm and the pressure of the fluid when the actuator is subjected to a given applied voltage. The model is based on the minimization of the total energy consisting of the capacitive energy, strain energy of the diaphragm, and the energy of the fluid which is considered to be an ideal gas. The method employed to study two pumps, one with an axisymmetric single cavity, and the other with an axisymmetric annular cavity.",

author = "Saif, {M. T.A.} and Alaca, {B. Erdem} and Huseyin Sehitoglu",

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N2 - A simplified analytical model is developed to predict the state of an electrostatically actuated micro pump at equilibrium. The state includes the deformed shape and internal stresses of the diaphragm and the pressure of the fluid when the actuator is subjected to a given applied voltage. The model is based on the minimization of the total energy consisting of the capacitive energy, strain energy of the diaphragm, and the energy of the fluid which is considered to be an ideal gas. The method employed to study two pumps, one with an axisymmetric single cavity, and the other with an axisymmetric annular cavity.

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Analytical modeling of electrostatic membrane actuator for micro pumps

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