Analysis of Growing Films of Complex Oxides by Rheed

I. Bozovic, J. N. Eckstein

Research output: Contribution to journalArticlepeer-review


Reflection high energy electron diffraction (RHEED) is perhaps the most important technique for in situ, real-time analysis of the growing surface in high quality films of complex oxides. In this article, some of the less known issues which include observation of superstructure modulation and twinning as well as studies of effective phase diagrams in search of optimal paths for growth of single-crystal films entirely free of second-phase precipitates are addressed. In general, all of these issues are specific to RHEED monitoring of deposition of complex oxides.

Original languageEnglish (US)
Pages (from-to)32-38
Number of pages7
JournalMRS Bulletin
Issue number5
StatePublished - May 1995
Externally publishedYes

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry


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