Analysis and removal of spurious response in SH0 lithium niobate MEMS resonators

Yong Ha Song, Ruochen Lu, Songbin Gong

Research output: Contribution to journalArticle

Abstract

This paper reports on the analysis and removal of transverse spurious modes in shear horizontal (SH0) mode lithium niobate (LiNbO3) laterally vibrating resonators (LVRs). A length-controlled electrode configuration that employs an optimized overlapping length between the adjacent electrodes has been developed to subdue the spurious modes. The technique modifies the stress and electric field distribution in the resonator body, consequently enabling near zero electromechanical coupling (2) for the higher order transverse spurious modes. The length-controlled electrode configuration also reduces the loss at the interface between the metal electrodes and the piezoelectric layer, demonstrating a more than × enhancement in quality factors {Q}. The fabricated LiNbO3 LVR with the length-controlled electrode configuration has shown an unprecedented spectral range (100-200 MHz) of spurious-free response, a high kt/2 value of 20.1%, a {Q} value of 1150, and, thereby, a remarkably high figure of merit of 230.

Original languageEnglish (US)
Article number7445857
Pages (from-to)2066-2073
Number of pages8
JournalIEEE Transactions on Electron Devices
Volume63
Issue number5
DOIs
StatePublished - May 2016

Keywords

  • High electromechanical coupling
  • MEMS
  • lithium niobate
  • piezoelectric laterally vibrating resonators (LVRs)
  • quality factor
  • spurious mode suppression.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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