An XPS study of the reaction of silane with oxidized copper, silver, and gold surfaces

Ralph G. Nuzzo; Lawrence H. Dubois

doi:10.1016/S0039-6028(85)80017-0

An XPS study of the reaction of silane with oxidized copper, silver, and gold surfaces

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Abstract

The reduction of copper, silver, and gold surface oxides by silane (SiH₄) is described. The silicon oxides generated by this process are characterized and the sensitivity of this class of reaction to such experimental parameters as substrate temperature, silane pressure, and metal oxide thickness are detailed. Oxidation of silver, as observed by X-ray photoelectron spectroscopy (XPS), is found to be complicated; the nature of the oxides generated by thermal and plasma assisted techniques is discussed.

Original language	English (US)
Pages (from-to)	119-132
Number of pages	14
Journal	Surface Science
Volume	149
Issue number	1
DOIs	https://doi.org/10.1016/S0039-6028(85)80017-0
State	Published - Jan 1 1985
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/S0039-6028(85)80017-0

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@article{318b92252d044704ae96fae65495dce2,

title = "An XPS study of the reaction of silane with oxidized copper, silver, and gold surfaces",

abstract = "The reduction of copper, silver, and gold surface oxides by silane (SiH4) is described. The silicon oxides generated by this process are characterized and the sensitivity of this class of reaction to such experimental parameters as substrate temperature, silane pressure, and metal oxide thickness are detailed. Oxidation of silver, as observed by X-ray photoelectron spectroscopy (XPS), is found to be complicated; the nature of the oxides generated by thermal and plasma assisted techniques is discussed.",

author = "Nuzzo, {Ralph G.} and Dubois, {Lawrence H.}",

year = "1985",

month = jan,

day = "1",

doi = "10.1016/S0039-6028(85)80017-0",

language = "English (US)",

volume = "149",

pages = "119--132",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - An XPS study of the reaction of silane with oxidized copper, silver, and gold surfaces

AU - Nuzzo, Ralph G.

AU - Dubois, Lawrence H.

PY - 1985/1/1

Y1 - 1985/1/1

N2 - The reduction of copper, silver, and gold surface oxides by silane (SiH4) is described. The silicon oxides generated by this process are characterized and the sensitivity of this class of reaction to such experimental parameters as substrate temperature, silane pressure, and metal oxide thickness are detailed. Oxidation of silver, as observed by X-ray photoelectron spectroscopy (XPS), is found to be complicated; the nature of the oxides generated by thermal and plasma assisted techniques is discussed.

AB - The reduction of copper, silver, and gold surface oxides by silane (SiH4) is described. The silicon oxides generated by this process are characterized and the sensitivity of this class of reaction to such experimental parameters as substrate temperature, silane pressure, and metal oxide thickness are detailed. Oxidation of silver, as observed by X-ray photoelectron spectroscopy (XPS), is found to be complicated; the nature of the oxides generated by thermal and plasma assisted techniques is discussed.

UR - http://www.scopus.com/inward/record.url?scp=0344951989&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0344951989&partnerID=8YFLogxK

U2 - 10.1016/S0039-6028(85)80017-0

DO - 10.1016/S0039-6028(85)80017-0

M3 - Article

AN - SCOPUS:0344951989

SN - 0039-6028

VL - 149

SP - 119

EP - 132

JO - Surface Science

JF - Surface Science

IS - 1

ER -

An XPS study of the reaction of silane with oxidized copper, silver, and gold surfaces

Abstract

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