An X-band lithium niobate acoustic RFFE Filter with FBW of 3.45% and IL of 2.7 dB

Yansong Yang, Liuqing Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper presents a micro-electro-mechanical system (MEMS) radio frequency front-end (RFFE) filter at 8.4 GHz. The center frequency of 8.4 GHz is achieved by resorting to the third-order antisymmetric Lamb wave mode (A3) in 650 nm thick Z-cut lithium niobate thin film. For the first time, a novel band-width-widening technique based on the utilizing of the self-induct-ance of the top interdigital electrodes is proposed to overcome the limitations set by the electromechanical coupling and satisfy the demands in miniaturization and wide bandwidth. The fabricated filter has demonstrated a 3 dB fractional bandwidth (FBW) of 3.45% (BW=290 MHz), a minimum insertion loss (IL) of 2.7 dB, and a compact footprint of 0.56 mm2. After utilizing bonding wires as matching inductors, the minimum IL can be decreased to be 2 dB in 50 Ω system.

Original languageEnglish (US)
Title of host publicationIMS 2020 - 2020 IEEE/MTT-S International Microwave Symposium
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781728168159
StatePublished - Aug 2020
Event2020 IEEE/MTT-S International Microwave Symposium, IMS 2020 - Virtual, Los Angeles, United States
Duration: Aug 4 2020Aug 6 2020

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X


Conference2020 IEEE/MTT-S International Microwave Symposium, IMS 2020
Country/TerritoryUnited States
CityVirtual, Los Angeles


  • 5G
  • Band-width-widening
  • Filters
  • Interdigital electrodes
  • Lithium niobate
  • MEMS
  • RFFE
  • X-band

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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