An integrated planning approach for a nanodeposition manufacturing process

Dong Tang, Udatta S Palekar

Research output: Contribution to journalArticle


This paper deals with the planning problem in a nanodeposition manufacturing process, in which a toolbit that consists of a multilayer grid of micro/nanofluidic channels is used to deposit nanoscale liquid materials to desired positions on workparts to form solid patterns. The objective is to obtain a planning procedure that achieves efficient throughput for the studied nanodeposition manufacturing systems. We break down the studied problem into several sub-problems as design pattern decomposition, nanopore assignment, liquid material routing in the multilayer grid fluidic network, and toolbit path planning. Efficient algorithms are proposed to solve these sub-problems individually, and then finally integrated into a framework that systematically plans the nanodeposition manufacturing process. A software tool that plans, simulates, and controls the nanodeposition manufacturing process by implementing the proposed algorithms is reported in this paper.

Original languageEnglish (US)
Pages (from-to)561-573
Number of pages13
JournalInternational Journal of Advanced Manufacturing Technology
Issue number5-8
StatePublished - Nov 1 2010


  • Fluidic routing
  • Nanodeposition manufacturing systems
  • Pattern decomposition
  • Process planning
  • Toolbit path planning

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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