An efficient algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The nonlinear coupled equations are solved by employing a Newton-GMRES technique. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled cases.
- Electromechanical simulations
- Microelectromechanical systems
- Numerical techniques
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering