Abstract
An efficient algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The nonlinear coupled equations are solved by employing a Newton-GMRES technique. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled cases.
Original language | English (US) |
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Pages (from-to) | 1-11 |
Number of pages | 11 |
Journal | Sensors and Actuators, A: Physical |
Volume | 58 |
Issue number | 1 |
DOIs | |
State | Published - Jan 1997 |
Externally published | Yes |
Keywords
- Electromechanical simulations
- Microelectromechanical systems
- Numerical techniques
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Instrumentation