An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures

N. R. Aluru, J. White

Research output: Contribution to journalArticlepeer-review

Abstract

An efficient algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The nonlinear coupled equations are solved by employing a Newton-GMRES technique. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled cases.

Original languageEnglish (US)
Pages (from-to)1-11
Number of pages11
JournalSensors and Actuators, A: Physical
Volume58
Issue number1
DOIs
StatePublished - Jan 1997
Externally publishedYes

Keywords

  • Electromechanical simulations
  • Microelectromechanical systems
  • Numerical techniques

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

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