An easy-to-manufacture 2 degree-of-freedom remote center of compliance for micro-transfer printing

Numair Ahmed, Reza Saeidpourazar, Placid M. Ferreira

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the design and development of a remote center of compliance (RCC) for a stamp holder for the micro-transfer printing process. One important aspect of the design of an automated printer to implementing the micro-transfer printing process is the generation of conformal contact between the stamp and the donor and acceptor substrates. Orientation errors during set up make this very hard to achieve with the introduction of some compliance. To introduce such compliance without the loss of overlay registration accuracy, a 2 degree of freedom (2-dof) remote centre of compliance is designed into the stamp holder so that its instantaneous rotation center at the face of the stamp. This design is implemented using flexure hinges in a configuration that makes the resulting system compact, in-expensive and easy to manufacture.

Original languageEnglish (US)
Title of host publicationAdvances in Precision Engineering
PublisherTrans Tech Publications Ltd
Pages471-477
Number of pages7
ISBN (Print)9780878492565
DOIs
StatePublished - Jan 1 2010

Publication series

NameKey Engineering Materials
Volume447 448
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Keywords

  • Error compensation
  • Flexure mechanism
  • Micro-transfer printing
  • Orientation errors
  • Remote center of compliance

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Ahmed, N., Saeidpourazar, R., & Ferreira, P. M. (2010). An easy-to-manufacture 2 degree-of-freedom remote center of compliance for micro-transfer printing. In Advances in Precision Engineering (pp. 471-477). (Key Engineering Materials; Vol. 447 448). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.447-448.471