An A1 Mode Resonator at 12 GHz using 160nm Lithium Niobate Suspended Thin Film

Steffen Link, Ruochen Lu, Yansong Yang, Ahmed E. Hassanien, Songbin Gong

Research output: Contribution to journalConference articlepeer-review


This paper demonstrates a 160 nm thick first- and third-order antisymmetric mode Lithium Niobate resonator. The presented device maintains feature sizes on the order of micrometers by thinning the piezoelectric resulting in a first-order mode at 11.77 GHz through direct scaling of state-of-the-art design approaches. Thinning leverages an Argon-based low-power physical etch, with attention paid specifically to surface roughness. The fabricated device demonstrates a first-order antisymmetric series resonant frequency of 11.77 GHz with an electromechanical coupling of 23.6% and a mechanical quality factor of 148 for a Figure of Merit of 35.1. In addition, the resonator's third-order antisymmetric mode achieves an electromechanical coupling of 3.7% and a mechanical quality factor of 66 at a frequency of 34.7 GHz.

Original languageEnglish (US)
JournalIEEE International Ultrasonics Symposium, IUS
StatePublished - 2021
Event2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China
Duration: Sep 11 2011Sep 16 2011


  • Acoustic Devices
  • MEMS resonators
  • asymmetrical Lamb waves
  • lithium niobate
  • microelectromechanical systems

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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