An 880 MHz ladder filter formed by arrays of laterally vibrating thin film Lithium Niobate resonators

Songbin Gong, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the first implementation of a ladder filter using Lithium Niobate based laterally vibrating resonator arrays. This demonstration is made possible by optimizing the device design parameters and using a distributed configuration of resonator arrays to simultaneously reduce spurious vibrations and insertion loss in a low impedance RF system. The designed distributed ladder filter, with a chip footprint of 0.5 mm2, consists of 37 resonators that are divided into 3 series and 2 shunt resonator arrays. The fabricated ladder filter based on LN LVRs showed an insertion loss of 3.5 dB and fractional bandwidth of 2.2%.

Original languageEnglish (US)
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1241-1244
Number of pages4
ISBN (Print)9781479935086
DOIs
StatePublished - 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: Jan 26 2014Jan 30 2014

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/TerritoryUnited States
CitySan Francisco, CA
Period1/26/141/30/14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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