TY - JOUR
T1 - Amorphous Titanium Carbide Films Produced by Low‐Temperature Organometallic CVD
AU - KALOYEROS, ALAIN E.
AU - WILLIAMS, WENDELL S.
AU - ALLOCCA, CLARE M.
AU - POLLINA, DEBORAH M.
AU - GIROLAMI, GREGORY S.
N1 - Copyright:
Copyright 2016 Elsevier B.V., All rights reserved.
PY - 1987/7
Y1 - 1987/7
N2 - Amorphous titanium carbide films were produced by low‐temperature (<300°C) and low‐pressure (<10−3 Pa) metallorganic chemical vapor deposition from tetraneopentyl‐titanium. X‐ray and electron diffraction studies showed that the deposits were amorphous. The coatings were analyzed by Auger electron spectroscopy, electron energy loss spectroscopy, and electron spectroscopy for chemical analysis. The results of these studies suggest a deposition mechanism and lead to an understanding of the film morphology and microchemistry and the exceptional stability of the amorphous phase. It is believed that organic clusters and hydrogen, resulting from the decomposition of the Ti(neopentyl)4 molecule, are present in the TiC films, and that they probably played a major role in stabilizing the amorphous phase to higher temperatures (>1000°C) than typical glassy metals, in agreement with other studies of similar systems. 1987 The American Ceramic Society
AB - Amorphous titanium carbide films were produced by low‐temperature (<300°C) and low‐pressure (<10−3 Pa) metallorganic chemical vapor deposition from tetraneopentyl‐titanium. X‐ray and electron diffraction studies showed that the deposits were amorphous. The coatings were analyzed by Auger electron spectroscopy, electron energy loss spectroscopy, and electron spectroscopy for chemical analysis. The results of these studies suggest a deposition mechanism and lead to an understanding of the film morphology and microchemistry and the exceptional stability of the amorphous phase. It is believed that organic clusters and hydrogen, resulting from the decomposition of the Ti(neopentyl)4 molecule, are present in the TiC films, and that they probably played a major role in stabilizing the amorphous phase to higher temperatures (>1000°C) than typical glassy metals, in agreement with other studies of similar systems. 1987 The American Ceramic Society
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U2 - 10.1111/j.1551-2916.1987.tb00091.x
DO - 10.1111/j.1551-2916.1987.tb00091.x
M3 - Article
AN - SCOPUS:84985122670
SN - 0883-5551
VL - 2
SP - 257
EP - 263
JO - Advanced Ceramic Materials
JF - Advanced Ceramic Materials
IS - 3 A
ER -