Original language | English (US) |
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Pages (from-to) | 1-2 |
Number of pages | 2 |
Journal | American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS |
State | Published - 2004 |
Externally published | Yes |
Event | 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States Duration: Nov 13 2004 → Nov 19 2004 |
ASJC Scopus subject areas
- General Engineering