Alternative approach for modeling the hot carrier degradation of the Si/SiO2 interface

Zhi Chen; Jinju Lee; Joseph W. Lyding

doi:10.1557/proc-513-313

Alternative approach for modeling the hot carrier degradation of the Si/SiO₂ interface

Research output: Contribution to journal › Conference article › peer-review

Abstract

An alternative approach for modeling the hot carrier degradation of the Si/SiO₂ interface based on the dispersive characteristics of the interface trap generation has been proposed. The time-dependent interface trap generation has been modeled using the stretched exponential expression. The conventional power law of degradation is just the approximation of this general form. Very good agreement has been found between the theoretical model and the experimental data. This approach gives more physical insight into the understanding of the mechanism for the interface trap generation.

Original language	English (US)
Pages (from-to)	313-317
Number of pages	5
Journal	Materials Research Society Symposium - Proceedings
Volume	513
DOIs	https://doi.org/10.1557/proc-513-313
State	Published - 1998
Event	Proceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA Duration: Apr 13 1998 → Apr 17 1998

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Online availability

10.1557/proc-513-313

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Cite this

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title = "Alternative approach for modeling the hot carrier degradation of the Si/SiO2 interface",

abstract = "An alternative approach for modeling the hot carrier degradation of the Si/SiO2 interface based on the dispersive characteristics of the interface trap generation has been proposed. The time-dependent interface trap generation has been modeled using the stretched exponential expression. The conventional power law of degradation is just the approximation of this general form. Very good agreement has been found between the theoretical model and the experimental data. This approach gives more physical insight into the understanding of the mechanism for the interface trap generation.",

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AU - Lee, Jinju

AU - Lyding, Joseph W.

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