AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing

Yuncong Liu, Apratim Khandelwal, Zhongjie Ren, Allen Wang, Xiuling Li, Philip X.L. Feng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This digest paper reports on the first experimental demonstration of optomechanical characteristics of three-dimensional (3D) aluminum nitride (AlN) self-rolled-up membrane (S-RuM) resonators with multimode resonances transduced via optical interferometry. For a full single-turn AlN S-RuM microtube, we have identified multimode resonances in the ~1-20MHz range with quality factors Qs ~800. For an unclosed AlN microtube with a longitudinal opening, we have observed up to 20 modes in ~0.5-110 MHz with Qs up to ~1200. Modeling of cross-sectional micro-ring cavity optomechanical coupling reveals a ~3.2kHz vacuum coupling rate and ~34fN radiation pressure force, in a 7μm-diameter, 10-turn AlN microtube. Numerical calculations suggest that the AlN microtube optomechanical resonator will yield a mass responsivity of ~3.3kHz/pg at the desired loading location. Understanding of the optomechanical properties facilitates the engineering of AlN S-RuM resonators for sensitive physical detection on chip, opening new avenues in optomechanical systems for precision sensing applications.

Original languageEnglish (US)
Title of host publicationIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages190-193
Number of pages4
ISBN (Electronic)9798350357929
DOIs
StatePublished - 2024
Externally publishedYes
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: Jan 21 2024Jan 25 2024

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/TerritoryUnited States
CityAustin
Period1/21/241/25/24

Keywords

  • Aluminum nitride (AlN)
  • mass sensing
  • MEMS
  • microtubes
  • optomechanics
  • self-rolled-up membrane (S-RuM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing'. Together they form a unique fingerprint.

Cite this