@inproceedings{ad22b544dcbc4b57987f3bdbc8bc5453,
title = "AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing",
abstract = "This digest paper reports on the first experimental demonstration of optomechanical characteristics of three-dimensional (3D) aluminum nitride (AlN) self-rolled-up membrane (S-RuM) resonators with multimode resonances transduced via optical interferometry. For a full single-turn AlN S-RuM microtube, we have identified multimode resonances in the ~1-20MHz range with quality factors Qs ~800. For an unclosed AlN microtube with a longitudinal opening, we have observed up to 20 modes in ~0.5-110 MHz with Qs up to ~1200. Modeling of cross-sectional micro-ring cavity optomechanical coupling reveals a ~3.2kHz vacuum coupling rate and ~34fN radiation pressure force, in a 7μm-diameter, 10-turn AlN microtube. Numerical calculations suggest that the AlN microtube optomechanical resonator will yield a mass responsivity of ~3.3kHz/pg at the desired loading location. Understanding of the optomechanical properties facilitates the engineering of AlN S-RuM resonators for sensitive physical detection on chip, opening new avenues in optomechanical systems for precision sensing applications.",
keywords = "Aluminum nitride (AlN), MEMS, mass sensing, microtubes, optomechanics, self-rolled-up membrane (S-RuM)",
author = "Yuncong Liu and Apratim Khandelwal and Zhongjie Ren and Allen Wang and Xiuling Li and Feng, {Philip X.L.}",
note = "We are thankful to the National Science Foundation (NSF) for financial support through the IUCRC program (Grant EEC-1939009, UF MIST Center, Phase II) and the IUSE program (Grant DUE-2142552).; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",
year = "2024",
doi = "10.1109/MEMS58180.2024.10439344",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "190--193",
booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",
address = "United States",
}