@inproceedings{758e56b0fb9e43c6ade514d9b4b831d0,
title = "AlN piezoelectric parametric oscillators with low phase noise",
abstract = "In this work, integrated parametric oscillators with low phase noise have been developed using geometrically optimized contour mode aluminum nitride (AlN) resonators. These resonators feature dual resonances for orthogonal contour modes at 37.2 and 74.4 MHz respectively. Their comprising parametric oscillators harness the resonantly enhanced parametric amplification in the mechanical domain to perform noise squeezing. The phase noise reduction via the parametric amplification process is analyzed with a numerical method. The measured result has shown a phase noise of -110 dBc/Hz at 1kHz offset for a 37.2 MHz parametric oscillator. Benchmarked to a conventional oscillator based on the identical resonator, the parametric oscillator has demonstrated the anticipated 25 dB reduction in phase noise at 1 kHz offset.",
author = "Ruochen Lu and Anming Gao and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2016 TRF.; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",
year = "2016",
doi = "10.31438/trf.hh2016.23",
language = "English (US)",
series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
publisher = "Transducer Research Foundation",
pages = "80--83",
editor = "Allen, {Mark G.} and Tina Lamers",
booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
}