AlN piezoelectric parametric oscillators with low phase noise

Ruochen Lu, Anming Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, integrated parametric oscillators with low phase noise have been developed using geometrically optimized contour mode aluminum nitride (AlN) resonators. These resonators feature dual resonances for orthogonal contour modes at 37.2 and 74.4 MHz respectively. Their comprising parametric oscillators harness the resonantly enhanced parametric amplification in the mechanical domain to perform noise squeezing. The phase noise reduction via the parametric amplification process is analyzed with a numerical method. The measured result has shown a phase noise of -110 dBc/Hz at 1kHz offset for a 37.2 MHz parametric oscillator. Benchmarked to a conventional oscillator based on the identical resonator, the parametric oscillator has demonstrated the anticipated 25 dB reduction in phase noise at 1 kHz offset.

Original languageEnglish (US)
Title of host publication2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
EditorsMark G. Allen, Tina Lamers
PublisherTransducer Research Foundation
Pages80-83
Number of pages4
ISBN (Electronic)9781940470023
DOIs
StatePublished - 2016
Event2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States
Duration: Jun 5 2016Jun 9 2016

Publication series

Name2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
CountryUnited States
CityHilton Head
Period6/5/166/9/16

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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