Algorithms for coupled domain MEMS simulation

N. Aluru, J. White

Research output: Contribution to journalConference articlepeer-review


The performance of micro-electro-mechanical systems depends on the interaction between electrical, mechanical, and fluidic forces. Simulating this coupled problem is made more difficult by the fact that most MEMS devices are innately three-dimensional and geometrically complicated. It is possible to simulate efficiently these devices using domain-specific solvers, provided the coupling between domains can be handled effectively. In this paper we will survey recent developments in coupled-domain simulation, and give computational comparisons between relaxation, multi-level Newton, and Newton-Iterative methods for 3-D electromechanical analysis.

Original languageEnglish (US)
Pages (from-to)686-690
Number of pages5
JournalProceedings - Design Automation Conference
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 34th Design Automation Conference - Anaheim, CA, USA
Duration: Jun 9 1997Jun 13 1997

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering


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