Algorithms for coupled domain MEMS simulation

The performance of micro-electro-mechanical systems depends on the interaction between electrical, mechanical, and fluidic forces. Simulating this coupled problem is made more difficult by the fact that most MEMS devices are innately three-dimensional and geometrically complicated. It is possible to simulate efficiently these devices using domain-specific solvers, provided the coupling between domains can be handled effectively. In this paper we will survey recent developments in coupled-domain simulation, and give computational comparisons between relaxation, multi-level Newton, and Newton-Iterative methods for 3-D electromechanical analysis.