Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates

Noo Li Jeon, Paul Clem, Duk Young Jung, Wenbin Lin, Gregory S Girolami, David A. Payne, Ralph G Nuzzo

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)891-895
Number of pages5
JournalAdvanced Materials
Volume9
Issue number11
DOIs
StatePublished - Sep 3 1997

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Semiconductor device structures
Ferroelectric devices
Infrared devices
Ferroelectric thin films
Film growth
Monolayers
Nucleation
Data storage equipment
Fabrication
Thin films
Film capacitor

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates. / Jeon, Noo Li; Clem, Paul; Jung, Duk Young; Lin, Wenbin; Girolami, Gregory S; Payne, David A.; Nuzzo, Ralph G.

In: Advanced Materials, Vol. 9, No. 11, 03.09.1997, p. 891-895.

Research output: Contribution to journalArticle

Jeon, Noo Li ; Clem, Paul ; Jung, Duk Young ; Lin, Wenbin ; Girolami, Gregory S ; Payne, David A. ; Nuzzo, Ralph G. / Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates. In: Advanced Materials. 1997 ; Vol. 9, No. 11. pp. 891-895.
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