Actuation of MEMS by light: An optical actuator

Marc Sulfridge, Norman Miller, Taher Saif, Keith O'Hara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents experimental evidence that MEMS devices may be manipulated using beams of light. Light possesses momentum, and hence it imparts a force equal to 2W/c when perfectly reflected by a surface. Here W is the total power of the reflected light, and c is the speed of light. The radiation pressure of light can be quite significant to MEMS devices. This actuation method is demonstrated, both in air and in vacuum, by switching the state of a bi-stable MEMS device. The associated heat transfer model is also presented.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2001
EditorsA.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Pages107-113
Number of pages7
StatePublished - Dec 1 2001
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: Nov 11 2001Nov 16 2001

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
Volume3

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
CountryUnited States
CityNew York, NY
Period11/11/0111/16/01

Fingerprint

MEMS
Actuators
Light velocity
Momentum
Vacuum
Heat transfer
Radiation
Air

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Sulfridge, M., Miller, N., Saif, T., & O'Hara, K. (2001). Actuation of MEMS by light: An optical actuator. In A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J-I. Mou, ... M. Dunn (Eds.), Micro-Electro-Mechanical Systems (MEMS) - 2001 (pp. 107-113). (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); Vol. 3).

Actuation of MEMS by light : An optical actuator. / Sulfridge, Marc; Miller, Norman; Saif, Taher; O'Hara, Keith.

Micro-Electro-Mechanical Systems (MEMS) - 2001. ed. / A.L. Lee; J. Simon; K. Breuer; S. Chen; R.S. Keynton; A. Malshe; J.-I. Mou; M. Dunn. 2001. p. 107-113 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); Vol. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sulfridge, M, Miller, N, Saif, T & O'Hara, K 2001, Actuation of MEMS by light: An optical actuator. in AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (eds), Micro-Electro-Mechanical Systems (MEMS) - 2001. American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS), vol. 3, pp. 107-113, 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 11/11/01.
Sulfridge M, Miller N, Saif T, O'Hara K. Actuation of MEMS by light: An optical actuator. In Lee AL, Simon J, Breuer K, Chen S, Keynton RS, Malshe A, Mou J-I, Dunn M, editors, Micro-Electro-Mechanical Systems (MEMS) - 2001. 2001. p. 107-113. (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)).
Sulfridge, Marc ; Miller, Norman ; Saif, Taher ; O'Hara, Keith. / Actuation of MEMS by light : An optical actuator. Micro-Electro-Mechanical Systems (MEMS) - 2001. editor / A.L. Lee ; J. Simon ; K. Breuer ; S. Chen ; R.S. Keynton ; A. Malshe ; J.-I. Mou ; M. Dunn. 2001. pp. 107-113 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)).
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