Abstract
This paper presents experimental evidence that MEMS devices may be manipulated using beams of light. Light possesses momentum, and hence it imparts a force equal to 2W/c when perfectly reflected by a surface. Here W is the total power of the reflected light, and c is the speed of light. The radiation pressure of light can be quite significant to MEMS devices. This actuation method is demonstrated, both in air and in vacuum, by switching the state of a bi-stable MEMS device. The associated heat transfer model is also presented.
| Original language | English (US) |
|---|---|
| Pages | 2681-2687 |
| Number of pages | 7 |
| State | Published - 2001 |
| Event | 2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States Duration: Nov 11 2001 → Nov 16 2001 |
Conference
| Conference | 2001 ASME International Mechanical Engineering Congress and Exposition |
|---|---|
| Country/Territory | United States |
| City | New York, NY |
| Period | 11/11/01 → 11/16/01 |
ASJC Scopus subject areas
- General Engineering