Active electrostatic compensation of micromechanical resonators under random vibrations

Shingo Yoneoka; James C. Salvia; Gaurav Bahl; Renata Melamud; Saurabh A. Chandorkar; Thomas W. Kenny

doi:10.1109/JMEMS.2010.2067444

Active electrostatic compensation of micromechanical resonators under random vibrations

Shingo Yoneoka, James C. Salvia, Gaurav Bahl, Renata Melamud, Saurabh A. Chandorkar, Thomas W. Kenny

Research output: Contribution to journal › Article › peer-review

Abstract

This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.

Original language	English (US)
Article number	5565396
Pages (from-to)	1270-1272
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	19
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2010.2067444
State	Published - Oct 2010
Externally published	Yes

Keywords

Acceleration
compensation
phase noise
resonators

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/JMEMS.2010.2067444

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title = "Active electrostatic compensation of micromechanical resonators under random vibrations",

abstract = "This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.",

keywords = "Acceleration, compensation, phase noise, resonators",

author = "Shingo Yoneoka and Salvia, {James C.} and Gaurav Bahl and Renata Melamud and Chandorkar, {Saurabh A.} and Kenny, {Thomas W.}",

note = "Funding Information: Manuscript received June 5, 2010; accepted July 14, 2010. Date of publication September 7, 2010; date of current version October 1, 2010. This work was supported in part by the Defense Advanced Research Projects Agency Harsh Environment Robust Micromechanical Technology Program under Grant ONR N66001-03-1-8942, in part by the Bosch Palo Alto Research and Technology Center, in part by the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award ECS-9731294, and in part by a National Science Foundation Graduate Research Fellowship. Subject Editor M. Mehregany.",

year = "2010",

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doi = "10.1109/JMEMS.2010.2067444",

language = "English (US)",

volume = "19",

pages = "1270--1272",

journal = "Journal of Microelectromechanical Systems",

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T1 - Active electrostatic compensation of micromechanical resonators under random vibrations

AU - Yoneoka, Shingo

AU - Salvia, James C.

AU - Bahl, Gaurav

AU - Melamud, Renata

AU - Chandorkar, Saurabh A.

AU - Kenny, Thomas W.

N1 - Funding Information: Manuscript received June 5, 2010; accepted July 14, 2010. Date of publication September 7, 2010; date of current version October 1, 2010. This work was supported in part by the Defense Advanced Research Projects Agency Harsh Environment Robust Micromechanical Technology Program under Grant ONR N66001-03-1-8942, in part by the Bosch Palo Alto Research and Technology Center, in part by the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award ECS-9731294, and in part by a National Science Foundation Graduate Research Fellowship. Subject Editor M. Mehregany.

PY - 2010/10

Y1 - 2010/10

N2 - This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.

AB - This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.

KW - Acceleration

KW - compensation

KW - phase noise

KW - resonators

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Active electrostatic compensation of micromechanical resonators under random vibrations

Abstract

Keywords

ASJC Scopus subject areas

Online availability

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