Active electrostatic compensation of micromechanical resonators under random vibrations

Shingo Yoneoka, James C. Salvia, Gaurav Bahl, Renata Melamud, Saurabh A. Chandorkar, Thomas W. Kenny

Research output: Contribution to journalArticlepeer-review


This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.

Original languageEnglish (US)
Article number5565396
Pages (from-to)1270-1272
Number of pages3
JournalJournal of Microelectromechanical Systems
Issue number5
StatePublished - Oct 2010
Externally publishedYes


  • Acceleration
  • compensation
  • phase noise
  • resonators

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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