Abstract
Micro-transfer printing is a powerful methodology for the manufacturing of 3D heterogeneously integrated micro-systems. This paper explores an active elastomeric composite dense array stamp which improves throughput while enabling local monitoring and control of the process. This dense array stamp is a scalable 4x4 geometry design with a multiplexed interconnection scheme, ensuring a small footprint. It consists of 16 individual stamps, each with a Lead Zirconate Titanate (PZT) actuator and a strain gauge sensor. Actuation and sensing characterization and closed-loop feedback control were established, and the dense array stamp performance was validated using selective pickup and place micro-transfer printing experiments.
Original language | English (US) |
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Pages (from-to) | 64-70 |
Number of pages | 7 |
Journal | 48th SME North American Manufacturing Research Conference, NAMRC 48 |
Volume | 48 |
DOIs | |
State | Published - 2020 |
Event | 48th SME North American Manufacturing Research Conference, NAMRC 48 - Cincinnati, United States Duration: Jun 22 2020 → Jun 26 2020 |
Keywords
- Active soft composite
- Micro-transfer printing
- PZT actuator
ASJC Scopus subject areas
- Artificial Intelligence
- Industrial and Manufacturing Engineering