Active elastomeric composite dense array stamp for micro-transfer printing

Nishana Ismail, Placid M. Ferreira

Research output: Contribution to journalConference articlepeer-review

Abstract

Micro-transfer printing is a powerful methodology for the manufacturing of 3D heterogeneously integrated micro-systems. This paper explores an active elastomeric composite dense array stamp which improves throughput while enabling local monitoring and control of the process. This dense array stamp is a scalable 4x4 geometry design with a multiplexed interconnection scheme, ensuring a small footprint. It consists of 16 individual stamps, each with a Lead Zirconate Titanate (PZT) actuator and a strain gauge sensor. Actuation and sensing characterization and closed-loop feedback control were established, and the dense array stamp performance was validated using selective pickup and place micro-transfer printing experiments.

Original languageEnglish (US)
Pages (from-to)64-70
Number of pages7
JournalProcedia Manufacturing
Volume48
DOIs
StatePublished - 2020
Event48th SME North American Manufacturing Research Conference, NAMRC 48 - Cincinnati, United States
Duration: Jun 22 2020Jun 26 2020

Keywords

  • Active soft composite
  • Micro-transfer printing
  • PZT actuator

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Artificial Intelligence

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