Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study

Ruochen Lu, Yansong Yang, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

This work reports a comparative study of acoustic loss between different Lamb waves at GHz in thin-film lithium niobate (LiNbO3). The propagation loss (PL) of higher-order Lamb waves in thin-film LiNbO3 is studied for the first time using acoustic delay line (ADL) testbeds. The acoustic wave attenuation and quality factors ( Q ) of different Lamb waves are extracted, showing higher Qtexts for higher-order Lamb modes than fundamental modes in air and vacuum at room temperature. The extracted Qtexts are higher than those reported in thin-film LiNbO3 resonators, implying the electrode and anchor-induced loss as the dominant loss factors. The ADL-based loss analysis framework is readily extendable to acoustic damping study in other microwave acoustic platforms.

Original languageEnglish (US)
Pages (from-to)876-884
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume30
Issue number6
DOIs
StatePublished - Dec 1 2021

Keywords

  • Acoustic attenuation
  • acoustic delay line
  • Lamb mode
  • lithium niobate
  • quality factor
  • thin-film devices

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study'. Together they form a unique fingerprint.

Cite this