Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study

Ruochen Lu, Yansong Yang, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

This work reports an experimental study of acoustic loss in thin-film lithium niobate (LiNbO3) using acoustic delay lines (ADLs). Unlike prior resonator-based quality factor ( Q ) studies, this approach directly extracts the damping in thin-film LiNbO3, avoiding the influence of other intricate loss mechanisms, e.g., anchor loss and electrode-induced loss. Acoustic attenuation of fundamental symmetric (S0) and shear horizontal (SH0) waves are studied in suspended LiNbO3 thin films of different thicknesses. The attenuation is significantly higher in thinner LiNbO3 films, suggesting the LiNbO3 crystal degradation during the microfabrication as the primary loss origin. Nevertheless, the extracted equivalent Q in thin-film LiNbO3 is still higher than reported values, suggesting that anchor design and electrode quality remain the bottlenecks for higher Q. The proposed loss extraction framework is readily extendable to other acoustic thin-film structures. [2021-0107]

Original languageEnglish (US)
Article number9469880
Pages (from-to)632-641
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume30
Issue number4
DOIs
StatePublished - Aug 2021

Keywords

  • Acoustic attenuation
  • acoustic delay line
  • lithium niobate
  • piezoelectric resonators
  • quality factor
  • thin-film devices

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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