Accurate simulation of RF MEMS VCO performance including phase noise

Manas Behera, Volodymyr Kratyuk, Sudipto K. De, Narayan R. Aluru, Yutao Hu, Kartikeya Mayaram

Research output: Contribution to journalArticlepeer-review


A new coupled circuit and electrostatic/mechanical simulator (COSMO) is presented for the design of low phase noise radio frequency (RF) microelectromechanical systems (MEMS) voltage-controlled oscillators (VCOs). The numerical solution of device level equations is used to accurately compute the capacitance of a MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. In addition, the noise from the MEMS capacitor is combined with a nonlinear circuit-level noise analysis to determine the phase noise of RF MEMS VCO. Simulations of two different MEMS VCO architectures show good agreement with experimentally observed behavior.

Original languageEnglish (US)
Pages (from-to)313-325
Number of pages13
JournalJournal of Microelectromechanical Systems
Issue number2
StatePublished - Apr 2005
Externally publishedYes


  • Circuit simulation
  • Coupled circuit and device simulation
  • Electrostatic/mechanical simulator
  • Microelectromechanical systems (MEMS) capacitor
  • Microelectromechanical systems voltage-controlled oscillator (MEMS VCO)
  • Noise simulation
  • Phase noise
  • Radio frequency voltage-controlled oscillator (RF VCO)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering


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