Abstract
Recent advancements in the field of piezoelectric micro-resonators have produced devices, such as lithium niobate laterally vibrating resonators, with very high electromechanical coupling factors (k t 2 ) and respectable quality factors (Q). As a result, the records of the figure of merit (FoM) for radio-frequency MEMS resonators have been broken several times in the past five years. As exciting as these high FoMs are, they impose unique caveats in accurately extracting the electromechanical coupling often due to the presence of spurious modes. It is a less noted issue for micro-resonators with moderate k t 2 , as spurious modes either are absent or do not significantly affect the common extraction technique based on identifying resonances and anti-resonances. This paper will first theoretically analyze how disregarding spurious modes can potentially lead to inaccurate extraction of k t 2 of the intended mode and then offer a framework that accounts for spurious modes and accurately extracts electromechanical coupling using a multi-resonance recursive fitting. [2018-0209]
| Original language | English (US) |
|---|---|
| Article number | 8624370 |
| Pages (from-to) | 209-218 |
| Number of pages | 10 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 28 |
| Issue number | 2 |
| DOIs | |
| State | Published - Apr 2019 |
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Keywords
- MBVD model
- MEMS resonator
- electromechanical coupling
- equivalent circuit model
- lithium niobate
- piezoelectricity
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Accurate extraction of large electromechanical coupling in piezoelectric MEMS resonators. / Lu, Ruochen; Li, Ming Huang; Yang, Yansong; Manzaneque, Tomas; Gong, Songbin.
In: Journal of Microelectromechanical Systems, Vol. 28, No. 2, 8624370, 04.2019, p. 209-218.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Accurate extraction of large electromechanical coupling in piezoelectric MEMS resonators
AU - Lu, Ruochen
AU - Li, Ming Huang
AU - Yang, Yansong
AU - Manzaneque, Tomas
AU - Gong, Songbin
PY - 2019/4
Y1 - 2019/4
N2 - Recent advancements in the field of piezoelectric micro-resonators have produced devices, such as lithium niobate laterally vibrating resonators, with very high electromechanical coupling factors (k t 2 ) and respectable quality factors (Q). As a result, the records of the figure of merit (FoM) for radio-frequency MEMS resonators have been broken several times in the past five years. As exciting as these high FoMs are, they impose unique caveats in accurately extracting the electromechanical coupling often due to the presence of spurious modes. It is a less noted issue for micro-resonators with moderate k t 2 , as spurious modes either are absent or do not significantly affect the common extraction technique based on identifying resonances and anti-resonances. This paper will first theoretically analyze how disregarding spurious modes can potentially lead to inaccurate extraction of k t 2 of the intended mode and then offer a framework that accounts for spurious modes and accurately extracts electromechanical coupling using a multi-resonance recursive fitting. [2018-0209]
AB - Recent advancements in the field of piezoelectric micro-resonators have produced devices, such as lithium niobate laterally vibrating resonators, with very high electromechanical coupling factors (k t 2 ) and respectable quality factors (Q). As a result, the records of the figure of merit (FoM) for radio-frequency MEMS resonators have been broken several times in the past five years. As exciting as these high FoMs are, they impose unique caveats in accurately extracting the electromechanical coupling often due to the presence of spurious modes. It is a less noted issue for micro-resonators with moderate k t 2 , as spurious modes either are absent or do not significantly affect the common extraction technique based on identifying resonances and anti-resonances. This paper will first theoretically analyze how disregarding spurious modes can potentially lead to inaccurate extraction of k t 2 of the intended mode and then offer a framework that accounts for spurious modes and accurately extracts electromechanical coupling using a multi-resonance recursive fitting. [2018-0209]
KW - MBVD model
KW - MEMS resonator
KW - electromechanical coupling
KW - equivalent circuit model
KW - lithium niobate
KW - piezoelectricity
UR - http://www.scopus.com/inward/record.url?scp=85060911042&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85060911042&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2019.2892708
DO - 10.1109/JMEMS.2019.2892708
M3 - Article
AN - SCOPUS:85060911042
VL - 28
SP - 209
EP - 218
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 2
M1 - 8624370
ER -