Accuracy issues in a high-level model for MEMS varactors

J. G. Sankaranarayanan, Manas Behera, Narayan Aluru, Kartikeya Mayaram

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present accuracy issues for an equivalent circuit model and an AHDL model (high-level models) of MEMS varactors. Simulations of different MEMS varactor structures were done using the high-level models and an electrostatic/mechanical solver EMS.9. The limitations of the varactor high-level models are presented in the context of a RF MEMS VCO operating at 1.6 GHz in a TSMC 0.35 m CMOS technology.

Original languageEnglish (US)
Title of host publicationBMAS 2003 - Proceedings of the 2003 IEEE International Workshop on Behavioral Modeling and Simulation
PublisherIEEE Computer Society
Pages144-148
Number of pages5
ISBN (Electronic)0780381351
DOIs
StatePublished - Jan 1 2003
EventIEEE International Workshop on Behavioral Modeling and Simulation, BMAS 2003 - San Jose, United States
Duration: Oct 7 2003Oct 8 2003

Publication series

NameProceedings of the IEEE International Workshop on Behavioral Modeling and Simulation, BMAS
Volume2003-January
ISSN (Print)2160-3804
ISSN (Electronic)2160-3812

Other

OtherIEEE International Workshop on Behavioral Modeling and Simulation, BMAS 2003
CountryUnited States
CitySan Jose
Period10/7/0310/8/03

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Keywords

  • CMOS technology
  • Circuit simulation
  • Context modeling
  • Electrostatics
  • Equivalent circuits
  • Micromechanical devices
  • Radiofrequency microelectromechanical systems
  • Semiconductor device modeling
  • Varactors
  • Voltage-controlled oscillators

ASJC Scopus subject areas

  • Computational Theory and Mathematics
  • Computer Science Applications
  • Computational Mechanics

Cite this

Sankaranarayanan, J. G., Behera, M., Aluru, N., & Mayaram, K. (2003). Accuracy issues in a high-level model for MEMS varactors. In BMAS 2003 - Proceedings of the 2003 IEEE International Workshop on Behavioral Modeling and Simulation (pp. 144-148). [1249874] (Proceedings of the IEEE International Workshop on Behavioral Modeling and Simulation, BMAS; Vol. 2003-January). IEEE Computer Society. https://doi.org/10.1109/BMAS.2003.1249874