@inproceedings{28d35971784144a8bd16159d2ea6079a,
title = "Accuracy issues in a high-level model for MEMS varactors",
abstract = "We present accuracy issues for an equivalent circuit model and an AHDL model (high-level models) of MEMS varactors. Simulations of different MEMS varactor structures were done using the high-level models and an electrostatic/mechanical solver EMS.9. The limitations of the varactor high-level models are presented in the context of a RF MEMS VCO operating at 1.6 GHz in a TSMC 0.35 m CMOS technology.",
keywords = "CMOS technology, Circuit simulation, Context modeling, Electrostatics, Equivalent circuits, Micromechanical devices, Radiofrequency microelectromechanical systems, Semiconductor device modeling, Varactors, Voltage-controlled oscillators",
author = "Sankaranarayanan, {J. G.} and Manas Behera and Narayan Aluru and Kartikeya Mayaram",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; IEEE International Workshop on Behavioral Modeling and Simulation, BMAS 2003 ; Conference date: 07-10-2003 Through 08-10-2003",
year = "2003",
doi = "10.1109/BMAS.2003.1249874",
language = "English (US)",
series = "Proceedings of the IEEE International Workshop on Behavioral Modeling and Simulation, BMAS",
publisher = "IEEE Computer Society",
pages = "144--148",
booktitle = "BMAS 2003 - Proceedings of the 2003 IEEE International Workshop on Behavioral Modeling and Simulation",
}