Abstract
A method of using electrostatic tuning to compensate the phase noise due to external vibrations in a MEMS oscillator is presented in this paper. An accelerometer measures the acceleration applied to a resonator, and a compensation signal generated by the accelerometer is added to the bias voltage. We achieve 91% reduction of the acceleration sensitivity for sinusoidal accelerations from 100 Hz to 300 Hz using a double-ended tuning fork resonator. This is the first demonstration of active acceleration compensation for MEMS resonators.
Original language | English (US) |
---|---|
Article number | 4805505 |
Pages (from-to) | 805-808 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
State | Published - 2009 |
Externally published | Yes |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering