Acceleration compensation of MEMS resonators using electrostatic tuning

S. Yoneoka, Gaurav Bahl, J. Salvia, K. L. Chen, A. B. Graham, H. K. Lee, G. Yama, R. N. Candler, T. W. Kenny

Research output: Contribution to journalConference article

Abstract

A method of using electrostatic tuning to compensate the phase noise due to external vibrations in a MEMS oscillator is presented in this paper. An accelerometer measures the acceleration applied to a resonator, and a compensation signal generated by the accelerometer is added to the bias voltage. We achieve 91% reduction of the acceleration sensitivity for sinusoidal accelerations from 100 Hz to 300 Hz using a double-ended tuning fork resonator. This is the first demonstration of active acceleration compensation for MEMS resonators.

Original languageEnglish (US)
Article number4805505
Pages (from-to)805-808
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
StatePublished - Jun 1 2009
Externally publishedYes
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: Jan 25 2009Jan 29 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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