@article{fccd818f906e4277b698479a7e88ded9,
title = "AC polarization for charge-drift elimination in resonant electrostatic MEMS and oscillators",
abstract = "This paper proposes the use of ac polarization for resonant electrostatic microelectromechanical systems that eliminates the frequency drift caused by dielectric charging and charge screening. It is mathematically and experimentally shown that an ac-polarized resonator can sustain stable oscillations when used in a positive feedback oscillator circuit. We also demonstrate an oscillator topology that generates a drift-free reference frequency tone with this technique in spite of using a resonator that exhibits large frequency drifts under dc polarization. Long-term data are presented for these drift-susceptible devices, showing a significant improvement in frequency stability.",
keywords = "AC biasing, charging, dielectrics, drift, frequency stability, oscillators, resonators",
author = "Gaurav Bahl and Salvia, {James C.} and Renata Melamud and Bongsang Kim and Howe, {Roger T.} and Kenny, {Thomas W.}",
note = "Funding Information: Manuscript received April 13, 2010; revised October 5, 2010; accepted November 1, 2010. Date of publication January 24, 2011; date of current version April 1, 2011. This work was supported in part by the Defense Advanced Research Projects Agency (DARPA) under Grant HR0011-06-0049 (Dr. D. L. Polla, Program Manager), by Bosch, by Epson, by HP, by Agilent, by Boeing, by Qualcomm, by the DARPA Harsh Environment Robust Micro-mechanical Technology under Grant ONR N66001-03-1-8942, by the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award ECS-9731294, and by the National Science Foundation Instrumentation for Materials Research Program under Grant DMR 9504099. The work of J. C. Salvia was supported in part by a National Science Foundation Graduate Fellowship. The work of R. Melamud was supported in part by a Stanford Graduate Fellowship. Subject Editor C. Hierold.",
year = "2011",
month = apr,
doi = "10.1109/JMEMS.2010.2100027",
language = "English (US)",
volume = "20",
pages = "355--364",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",
}