AC-excited microcavity discharge device and method

Nels P Ostrom (Inventor), James Gary Eden (Inventor), Sung-Jin Park (Inventor), Kuo-Feng (Kevin) Chen (Inventor)

Research output: Patent


A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric on a first conducting layer. A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time-varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.
Original languageEnglish (US)
U.S. patent number7477017
Filing date1/25/05
StatePublished - Jan 13 2009


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