Intentional carbon doping of low-pressure metalorganic chemical vapor deposition (MOCVD) grown InP has been attempted with a 500 ppm mixture of 13CCl4 in high-purity H2, which has been used to obtain carbon-acceptor concentrations as high as 1×1019 cm-3 in GaAs. Under growth conditions similar to those used for heavy carbon incorporation in GaAs, injection of 13CCl4 into the growth reactor during growth of InP did not produce any measurable change in the carrier concentration of the InP epitaxial layers or any change in the 13C concentration above the 13C background in secondary-ion mass spectroscopy analysis. These results support previous low-temperature photoluminescence measurements of high-purity InP in which no residual carbon acceptor is observed under many growth techniques and growth conditions, and hence support the hypothesis that carbon is not incorporated in InP grown by MOCVD.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)